Design and Fabrication of a Kirigami-Inspired Electrothermal MEMS Scanner with Large Displacement
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Micromachines
سال: 2020
ISSN: 2072-666X
DOI: 10.3390/mi11040362